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Taking the Risks out of Wafer Manufacturing
Standalone Edge DAQ that Enables an Intelligent Dry Pump Monitoring Solution
Ensuring all process equipment is in tip-top shape is critical to semiconductor manufacturing in pursuing wafer production quality and yield. For example, if the dry pump of a low pressure chemical vapor deposition (LPCVD) system or ion implanter used in the diffusion process provides insufficient vacuum or fails, causing back pressure to push air and foreign particles into the chamber, the entire run of wafers may need to be scrapped. To address these issues, ADLINK’s dry pump monitoring solution can help semiconductor manufacturers eliminate the risk of an unexpected shutdown and optimize equipment management.
Why ADLINK?
ADLINK Edge DAQ is equipped with optimized edge computing capabilities to process data locally and supports multiple data formats.
ADLINK Edge DAQ can be daisy-chained using two embedded Ethernet ports with switching functionality to save up to 70% in deployment costs.
ADLINK Edge DAQ supports TCP/IP and Modbus TCP protocols and can send field data to SCADA systems or PLCs without an extra protocol gateway to save up to 50% in protocol integration costs.
ADLINK Edge DAQ has a built-in web console so engineers can perform remote updates and configuration anytime and anywhere.
Proven Success Cases
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Intelligent Pump Monitoring
ADLINK’s pump monitoring solution allows users to ensure wafer delivery and quality yield, reduce the risk of downtime, and minimize overall costs of equipment operation and maintenance.
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Data Acquisition for Smart Factory
A Korean semiconductor manufacturer deployed the ADLINK Edge DAQ system in its recently expanded facility in China to collect comprehensive equipment and environmental data to build a truly smart factory.
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Offerings
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Edge DAQ
Series -
MCM-100 Intel Atom® x7-E3950 Processor-Based Machine Condition Monitoring Edge Platform Learn moreMCM-204 Standalone Ethernet DAQ with 4-ch AI, 24-bit, 128KS/s, 4-ch DI/O Learn moreMCM-216/ MCM-218 Standalone Ethernet DAQ with 8/16-ch AI, 16-bit, 250kS/s, 4-ch DI/O Learn more